High Purity Diaphragm Valves

FITOK diaphragm valves are designed for the most demanding applications in semiconductors, specialty gases, UHP and critical vacuum and deposition processes. Their packless design and a flow path free of threads or springs minimise particle generation and ensure zero external leakage. The FITOK diaphragm valve range includes low and high pressure valves, low and high flow, manual and pneumatic versions, springless and compact models, and dedicated solutions for ALD (Atomic Layer Deposition), essential for precise gas control at atomic scale. All models can undergo FC-02 (high purity) and FC-03 (ultra high purity) cleaning and packaging processes, ensuring particle removal, controlled chemical cleaning, drying in a filtered atmosphere and cleanroom packaging. Electropolished surfaces reach down to Ra 5 μin (0.13 μm), making purging and cleaning easier. Cobalt alloy diaphragms (and BeCu in high pressure versions) provide a long service life even under intensive cycling and with corrosive gases. Metal-to-metal construction ensures superior leak tightness, and the absence of dead spaces allows complete purging. With multiple connections, materials, actuators and configurations available, FITOK diaphragm valves optimise gas control, reduce contamination, minimise downtime and increase operational safety in high purity and ultra high purity environments. At Lexier we offer our experience and specialised advice to help you select the most suitable valve for your process, ensuring maximum purity, reliability and efficiency.