Semiconductors and Microelectronics
At LEXIER we know the cleanliness, surface finish and leak-tightness requirements of process gas lines. We help you choose the right high purity components for every point of your installation.
Semiconductor and microelectronics manufacturing requires ultra-high purity (UHP) gas distribution systems: any particle, moisture or metallic contaminant in the line can affect wafer yield. Valves, fittings and tubing must therefore have electropolished surfaces, minimal internal volume and no dead spaces.
In processes such as atomic layer deposition (ALD), atomic layer etching (ALE) or chemical vapour deposition (CVD), valves must also offer very fast actuation cycles and a long service life, and hazardous gas lines usually require double-containment coaxial tubing.
FITOK offers a complete range for these applications: diaphragm valves for ALD, block distribution valves, weld fittings and electropolished and coaxial tubing.
Products for Semiconductors and Microelectronics
Our Partners
Our alliances with world-leading valve and component manufacturers enable us to offer our customers the highest quality, reliable and durable products.
How can we support your project?
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Phone: +34 931 71 31 01 · Email: lexier@lexier.es